Mems Phased Array Detection in Contact with Solids
نویسنده
چکیده
We report on the development of transducers for ultrasonic flaw detection which can be permanently mounted at critical locations on structures. We will show that MEMS capacitive diaphragm transducers can be bonded to metal or plexiglas test speciments without damage and that ultrasonic energy can be efficiently coupled into the transducer. It will be demonstrated that transducer arrays can be operated as a phased array in order to determine the direction and distance of an ultrasonic source. In addition, the detection of flaws or voids in a test specimen will also be demonstrated.
منابع مشابه
Experiments in Ultrasonic Flaw Detection using a MEMS Transducer
In earlier work we developed a MEMS phased array transducer, fabricated in the MUMPs process, and we reported on initial experimental studies in which the device was affixed into contact with solids. We demonstrated the successful detection of signals from a conventional ultrasonic source, and the successful localization of the source in an off-axis geometry using phased array signal processing...
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